Effect of Target Erosion on Properties of Molybdenum Films

Abstract

The influence exerted by the profile of the zone in which the target is sputtered on the structure and properties of molybdenum films produced by magnetron sputtering with the discharge stabilized in its current and power was examined. It was shown that the resulting films have a (110) texture and columnar microstructure across their thickness. The physicomechanical properties of the films (hardness, elastic-plastic characteristics) were examined. A decrease in the plasticity of the molybdenum films is observed with increasing erosion of the target. A relationship is demonstrated between the deposition parameters of a film and the rate of its anodic dissolution in an acid medium as regards the microstructure of molybdenum.