Effect of Aerosol-Assisted Chemical Vapor Deposition Parameters on Characteristics of the Resulting Carbon-containing Particles

详细

Specific features of the chemical vapor deposition of carbon-containing nanoparticles from aerosols of CH₅COOH–C₃H₇NO solutions, including the effect of the main technological parameters on the size characteristics, structure, and composition of the products being formed, are described. It is shown that the shape, size, and structure of the particles being formed are determined by processes occurring both in the downstream-first evaporation zone and in the main pyrolysis zone, and the temperatures of these zones are the most important technological parameters. It was found that the concentration of benzoic acid in solution can be used as a technological parameter making it possible to gradually vary the size characteristics of the carbon particles obtained. The results of the study form a basis for development of a technology and equipment for obtaining carbon-containing nanoparticles.