PECVD synthesis of As–S glasses

Аннотация

Chalcogenide glasses of the As–S system were first obtained by melting of solid products of interaction between As and S in low-temperature argon plasma. The plasma-chemical synthesis was performed at a reactor wall temperature not exceeding 250°C. The content of S in the As–S glasses is 54 to 72 mol %. The elemental, phase, and impurity composition of the glasses and their glass-transition point and optical properties were studied.