Author Details
Osipov, A. A.
Issue | Section | Title | File |
Vol 89, No 6 (2016) | Inorganic Synthesis and Industrial Inorganic Chemistry | Optimization of technological parameters in plasma chemical etching of quartz single crystals | |
Vol 91, No 8 (2018) | Inorganic Synthesis and Industrial Inorganic Chemistry | Development of Process for Fast Plasma-Chemical Through Etching of Single-Crystal Quartz in SF6/O2 Gas Mixture |