Evolution of morphology and structure with growth of thickness of condensed films of Pd–Cu on a surface with open porosity

详细

Cross sections obtained by the method of a focused ion beam and fractures of the PdCu/Al₂O₃ nanocomposite synthesized by magnetron sputtering (MS) of alloy-type target PdCu and condensation in vacuum on the surface of nanoporous Al₂O₃ produced by anodic oxidation of aluminum foil are investigated using the methods of high-resolution scanning electron microscopy implemented on the basis of a Helios 600i setup (FEI, United States). Regularities of the formation of the structure and morphology of crystallites of vacuum condensate of Pd–Cu solid solution with a thickness of 0.1–4 μm on a surface with open porosity are disclosed. Approaches to the formation of the gradient structures near a free surface are discussed, and the conditions of the initiation of MS mechanisms of the formation of discrete, porous, and anisotropic condensates are found. Approaches to nonselective filling of nanopores in a dielectric by metal clusters and forming of the gradient structure of the nanocomposite PdCu/Al₂O₃ are carried out.