Spark Plasma Sintering of SmS-Based Ceramic Targets for the Magnetron Sputtering

Аннотация

The results of studying the electric-spark plasma sintering of samarium monosulfide ceramics are presented. The dependence of the microstructure and phase composition of ceramics on the temperature of spark plasma sintering is studied on the basis of the data of scanning electron microscopy, energy dispersion X-ray microanalysis, and powder X-ray diffraction of synthesized samples. It is shown that a dense, nonporous ceramics, the phase composition of which is close to the composition of the initial powder, is formed at a sintering temperature of 1200°C.