A CVD Diamond-Based Photodetector for the Visible and Near-IR Spectral Range
- Авторы: Kukushkin V.1,2, Radischev D.1, Lobaev M.1, Bogdanov S.1, Zdoroveischev A.3, Chunin I.3
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Учреждения:
- Institute of Applied Physics, Russian Academy of Sciences
- Lobachevsky State University of Nizhny Novgorod
- Physical-Technical Research Institute
- Выпуск: Том 43, № 12 (2017)
- Страницы: 1121-1123
- Раздел: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/206914
- DOI: https://doi.org/10.1134/S1063785017120215
- ID: 206914
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Аннотация
A photodetector for the visible and near-IR spectral range has been created on the basis of a chemical- vapor-deposited diamond modulation-doped with boron. The detected electromagnetic radiation is absorbed in a thin Cr (7 nm)–Au (5.5 nm) bimetallic sublayer deposited on the surface of a modulationdoped diamond film comprising a highly doped (up to 5 × 1019 cm–3) 3-nm-thick delta-layer, low-doped (~1017 cm–3) 800-nm-thick sublayer, and highly doped (1020 cm–3) ~10-μm-thick sublayer with an ohmic Ti(50 nm)/Pt(15 nm)/Au(30 nm) contact. Holes generated in the bimetallic sublayer diffuse into diamond and are accelerated by an electric field in the low-doped sublayer to form a response photocurrent. The ampere/watt responsivity of the photodetector reaches 1 μA/W at a radiation wavelength of 445 nm and 0.18 μA/W at 1.06 μm.
Об авторах
V. Kukushkin
Institute of Applied Physics, Russian Academy of Sciences; Lobachevsky State University of Nizhny Novgorod
Автор, ответственный за переписку.
Email: vakuk@appl.sci-nnov.ru
Россия, Nizhny Novgorod; Nizhny Novgorod
D. Radischev
Institute of Applied Physics, Russian Academy of Sciences
Email: vakuk@appl.sci-nnov.ru
Россия, Nizhny Novgorod
M. Lobaev
Institute of Applied Physics, Russian Academy of Sciences
Email: vakuk@appl.sci-nnov.ru
Россия, Nizhny Novgorod
S. Bogdanov
Institute of Applied Physics, Russian Academy of Sciences
Email: vakuk@appl.sci-nnov.ru
Россия, Nizhny Novgorod
A. Zdoroveischev
Physical-Technical Research Institute
Email: vakuk@appl.sci-nnov.ru
Россия, Nizhny Novgorod
I. Chunin
Physical-Technical Research Institute
Email: vakuk@appl.sci-nnov.ru
Россия, Nizhny Novgorod