Quantum efficiency of 4H-SiC detectors within the range of 114–400 nm

Аннотация

Electrical and spectrometric characteristics of 4H-SiC detectors with Cr Schottky barriers in the spectral ranges of 114–175 and 210–400 nm are studied. It is demonstrated that the quality of commercially available 4H-SiC layers is sufficient to construct UV radiation detectors with their external quantum efficiency exceeding 20% in the studied spectral ranges.