Ion plasma deposition of oxide films with graded-stoichiometry composition: Experiment and simulation
- Авторлар: Volpyas V.1, Tumarkin A.1, Mikhailov A.1,2, Kozyrev A.1, Platonov R.1,3
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Мекемелер:
- St. Petersburg State Electrotechnical University (LETI)
- St. Petersburg National Research University of Information Technologies, Mechanics and Optics (ITMO University)
- Dagestan State University
- Шығарылым: Том 42, № 7 (2016)
- Беттер: 758-760
- Бөлім: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/200263
- DOI: https://doi.org/10.1134/S1063785016070300
- ID: 200263
Дәйексөз келтіру
Аннотация
A method of ion plasma deposition is proposed for obtaining thin multicomponent films with continuously graded composition in depth of the film. The desired composition–depth profile is obtained by varying the working gas pressure during deposition in the presence of an additional adsorbing screen in the drift space between a sputtered target and substrate. Efficiency of the proposed method is confirmed by Monte Carlo simulation of the deposition of thin films of BaxSr1–xTiO3 (BSTO) solid solution. It is demonstrated that, during sputtering of a Ba0.3Sr0.7TiO3 target, the parameter of composition stoichiometry in the growing BSTO film varies in the interval of x = 0.3–0.65 when the gas pressure is changed within 2–60 Pa.
Авторлар туралы
V. Volpyas
St. Petersburg State Electrotechnical University (LETI)
Email: r.a.platonov@gmail.com
Ресей, St. Petersburg, 197376
A. Tumarkin
St. Petersburg State Electrotechnical University (LETI)
Email: r.a.platonov@gmail.com
Ресей, St. Petersburg, 197376
A. Mikhailov
St. Petersburg State Electrotechnical University (LETI); St. Petersburg National Research University of Information Technologies, Mechanics and Optics (ITMO University)
Email: r.a.platonov@gmail.com
Ресей, St. Petersburg, 197376; St. Petersburg, 197101
A. Kozyrev
St. Petersburg State Electrotechnical University (LETI)
Email: r.a.platonov@gmail.com
Ресей, St. Petersburg, 197376
R. Platonov
St. Petersburg State Electrotechnical University (LETI); Dagestan State University
Хат алмасуға жауапты Автор.
Email: r.a.platonov@gmail.com
Ресей, St. Petersburg, 197376; Makhachkala, Dagestan, 367000