Email this article Controlled Synthesis of Graphene on Copper Using the Method of Implantation of Carbon Recoil Atoms
- Authors: Vyatkin A.F.1
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Affiliations:
- Institute of Microelectronics Technology and High-Purity Materials, Russian Academy of Sciences
- Issue: Vol 45, No 2 (2019)
- Pages: 170-172
- Section: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/208224
- DOI: https://doi.org/10.1134/S1063785019020354
- ID: 208224
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Abstract
A method of graphene synthesis on the surface of copper foil by cold implantation of carbon recoil atoms is considered. It is established that monolayer graphene films are formed on the surface of carbon-implanted copper foil under certain conditions (annealing temperature and duration, cooling rate) of postimplantation processing.
About the authors
A. F. Vyatkin
Institute of Microelectronics Technology and High-Purity Materials, Russian Academy of Sciences
Author for correspondence.
Email: vyatkin@iptm.ru
Russian Federation, Chernogolovka, Moscow oblast, 142432
