Email this article Microprofile formation by thermal oxidation of molybdenum films
- Authors: Kazanskiy N.L.1,2, Moiseev O.Y.1, Poletayev S.D.1,2
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Affiliations:
- Image Processing Systems Institute
- Samara State Aerospace University (National Research University)
- Issue: Vol 42, No 2 (2016)
- Pages: 164-166
- Section: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/197169
- DOI: https://doi.org/10.1134/S1063785016020085
- ID: 197169
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Abstract
The possibility of forming a microprofile in diffractive optical elements by thermal oxidation of thin molybdenum films is analyzed. It is shown that the gain in the thickness of a starting film in the thermal oxidation process may reach a threefold value, with the optical quality of the surface preserved.
About the authors
N. L. Kazanskiy
Image Processing Systems Institute; Samara State Aerospace University (National Research University)
Email: sergpolet@gmail.com
Russian Federation, Samara, 443001; Samara, 443086
O. Yu. Moiseev
Image Processing Systems Institute
Email: sergpolet@gmail.com
Russian Federation, Samara, 443001
S. D. Poletayev
Image Processing Systems Institute; Samara State Aerospace University (National Research University)
Author for correspondence.
Email: sergpolet@gmail.com
Russian Federation, Samara, 443001; Samara, 443086
