Tunnel Мagnetoresistive Еlements for Magnetic Field Sensors
- Авторы: Pashen’kin I.1, Sapozhnikov M.1,2, Gusev N.1, Rogov V.1, Tatarskiy D.1,2, Fraerman A.1
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Учреждения:
- Institute for Physics of Microstructures
- Lobachevsky State University
- Выпуск: Том 64, № 11 (2019)
- Страницы: 1642-1645
- Раздел: Article
- URL: https://journals.rcsi.science/1063-7842/article/view/204456
- DOI: https://doi.org/10.1134/S1063784219110227
- ID: 204456
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Аннотация
We have developed technology for manufacturing chains of CoFe/Al2O3/NiFe tunnel magnetoresistive (TMR) elements with pinning on the IrMn antiferromagnetic layer. We have studied the dependence of the shape of magnetoresistance curves on the geometric parameters of laterally bounded TMR contacts, as well as on the mutual orientation of the external magnetic field and the axis of unidirectional anisotropy of the pinned CoFe layer. The chain resistance ranges from several tens of kiloohms to hundreds of megaohms depending on the thickness of the tunnel-transparent dielectric layer with a magnetoresistive effect of 10–15%. The developed technology can be used in manufacturing tunneling magnetic field sensors.
Об авторах
I. Pashen’kin
Institute for Physics of Microstructures
Автор, ответственный за переписку.
Email: pashenkin@ipmras.ru
Россия, Nizhny Novgorod, 603950
M. Sapozhnikov
Institute for Physics of Microstructures; Lobachevsky State University
Email: pashenkin@ipmras.ru
Россия, Nizhny Novgorod, 603950; Nizhny Novgorod, 603950
N. Gusev
Institute for Physics of Microstructures
Email: pashenkin@ipmras.ru
Россия, Nizhny Novgorod, 603950
V. Rogov
Institute for Physics of Microstructures
Email: pashenkin@ipmras.ru
Россия, Nizhny Novgorod, 603950
D. Tatarskiy
Institute for Physics of Microstructures; Lobachevsky State University
Email: pashenkin@ipmras.ru
Россия, Nizhny Novgorod, 603950; Nizhny Novgorod, 603950
A. Fraerman
Institute for Physics of Microstructures
Email: pashenkin@ipmras.ru
Россия, Nizhny Novgorod, 603950