Мақаланы E-mail арқылы жіберу Microturbines Formed with the Aid of Direct Laser Recording on Photoresist
- Авторлар: Skidanov R.V.1,2, Moiseev O.Y.1,2, Ganchevskaya S.V.1,2
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Мекемелер:
- Institute of Image Processing Systems
- Korolev State Aerospace University
- Шығарылым: Том 63, № 6 (2018)
- Беттер: 862-865
- Бөлім: Optics
- URL: https://journals.rcsi.science/1063-7842/article/view/201532
- DOI: https://doi.org/10.1134/S1063784218060208
- ID: 201532
Дәйексөз келтіру
Ашық рұқсат
Рұқсат берілді
Тек жазылушылар үшін
Аннотация
A method for fabrication of mechanical elements (microturbines) that receive torque from vortex optical beams is proposed. Experimental results on fabrication of multiple microturbines are presented. Shapes of the microturbines are measured using an optical microscope, ZYGO white-light interferometer, and electron microscope.
Авторлар туралы
R. Skidanov
Institute of Image Processing Systems; Korolev State Aerospace University
Email: sofi@smr.ru
Ресей, Samara, 443001; Samara, 443086
O. Moiseev
Institute of Image Processing Systems; Korolev State Aerospace University
Email: sofi@smr.ru
Ресей, Samara, 443001; Samara, 443086
S. Ganchevskaya
Institute of Image Processing Systems; Korolev State Aerospace University
Хат алмасуға жауапты Автор.
Email: sofi@smr.ru
Ресей, Samara, 443001; Samara, 443086
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