Calculation of field in plane-layered microelectronic materials

Abstract

A modification of the method for calculation of horizontal and vertical components of monochromatic field that is generated in plane-layered medium by horizontal current flow and described using wave equation is proposed for problems of microelectronics. The proposed solution is based on the verified method of equivalent propagation constant that makes it possible to substantially reduce the amount of calculations in comparison with alternative methods based on rigorous dynamic approach. The analysis illustrates the application of the method at relatively small distances.