<?xml version="1.0" encoding="UTF-8"?>
<!DOCTYPE root>
<article xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:ali="http://www.niso.org/schemas/ali/1.0/" article-type="research-article" dtd-version="1.2" xml:lang="en"><front><journal-meta><journal-id journal-id-type="publisher-id">Semiconductors</journal-id><journal-title-group><journal-title xml:lang="en">Semiconductors</journal-title><trans-title-group xml:lang="ru"><trans-title>Semiconductors</trans-title></trans-title-group></journal-title-group><issn publication-format="print">1063-7826</issn><issn publication-format="electronic">1090-6479</issn><publisher><publisher-name xml:lang="en">Физико-технический институт им. А.Ф.Иоффе РАН</publisher-name></publisher></journal-meta><article-meta><article-id pub-id-type="publisher-id">198502</article-id><article-id pub-id-type="doi">10.1134/S1063782616110166</article-id><article-categories><subj-group subj-group-type="toc-heading"><subject>XX International Symposium “Nanophysics and Nanoelectronics”, Nizhny Novgorod, March 14–18, 2016</subject></subj-group><subj-group subj-group-type="article-type"><subject>Research Article</subject></subj-group></article-categories><title-group><article-title xml:lang="en">Epitaxial GaN layers formed on langasite substrates by the plasma-assisted MBE method</article-title></title-group><contrib-group><contrib contrib-type="author"><name><surname>Lobanov</surname><given-names>D. N.</given-names></name><address><country country="RU">Russian Federation</country></address><email>dima@ipmras.ru</email><xref ref-type="aff" rid="aff1"/><xref ref-type="aff" rid="aff2"/></contrib><contrib contrib-type="author"><name><surname>Novikov</surname><given-names>A. V.</given-names></name><address><country country="RU">Russian Federation</country></address><email>dima@ipmras.ru</email><xref ref-type="aff" rid="aff1"/><xref ref-type="aff" rid="aff2"/></contrib><contrib contrib-type="author"><name><surname>Yunin</surname><given-names>P. A.</given-names></name><address><country country="RU">Russian Federation</country></address><email>dima@ipmras.ru</email><xref ref-type="aff" rid="aff1"/></contrib><contrib contrib-type="author"><name><surname>Skorohodov</surname><given-names>E. V.</given-names></name><address><country country="RU">Russian Federation</country></address><email>dima@ipmras.ru</email><xref ref-type="aff" rid="aff1"/></contrib><contrib contrib-type="author"><name><surname>Shaleev</surname><given-names>M. V.</given-names></name><address><country country="RU">Russian Federation</country></address><email>dima@ipmras.ru</email><xref ref-type="aff" rid="aff1"/></contrib><contrib contrib-type="author"><name><surname>Drozdov</surname><given-names>M. N.</given-names></name><address><country country="RU">Russian Federation</country></address><email>dima@ipmras.ru</email><xref ref-type="aff" rid="aff1"/></contrib><contrib contrib-type="author"><name><surname>Khrykin</surname><given-names>O. I.</given-names></name><address><country country="RU">Russian Federation</country></address><email>dima@ipmras.ru</email><xref ref-type="aff" rid="aff1"/></contrib><contrib contrib-type="author"><name><surname>Buzanov</surname><given-names>O. A.</given-names></name><address><country country="RU">Russian Federation</country></address><email>dima@ipmras.ru</email><xref ref-type="aff" rid="aff3"/></contrib><contrib contrib-type="author"><name><surname>Alenkov</surname><given-names>V. V.</given-names></name><address><country country="RU">Russian Federation</country></address><email>dima@ipmras.ru</email><xref ref-type="aff" rid="aff3"/></contrib><contrib contrib-type="author"><name><surname>Folomin</surname><given-names>P. I.</given-names></name><address><country country="RU">Russian Federation</country></address><email>dima@ipmras.ru</email><xref ref-type="aff" rid="aff4"/></contrib><contrib contrib-type="author"><name><surname>Gritsenko</surname><given-names>A. B.</given-names></name><address><country country="RU">Russian Federation</country></address><email>dima@ipmras.ru</email><xref ref-type="aff" rid="aff4"/></contrib></contrib-group><aff id="aff1"><institution>Institute for Physics of Microstructures</institution></aff><aff id="aff2"><institution>Lobachevsky State University, Russian Academy of Sciences</institution></aff><aff id="aff3"><institution>JSC Fomos-Materials</institution></aff><aff id="aff4"><institution>The National University of Science and Technology “MISiS”</institution></aff><pub-date date-type="pub" iso-8601-date="2016-11-01" publication-format="electronic"><day>01</day><month>11</month><year>2016</year></pub-date><volume>50</volume><issue>11</issue><fpage>1511</fpage><lpage>1514</lpage><history><date date-type="received" iso-8601-date="2023-12-23"><day>23</day><month>12</month><year>2023</year></date></history><permissions><copyright-statement xml:lang="en">Copyright ©; 2016, Pleiades Publishing, Ltd.</copyright-statement><copyright-year>2016</copyright-year><copyright-holder xml:lang="en">Pleiades Publishing, Ltd.</copyright-holder></permissions><self-uri xlink:href="https://journals.rcsi.science/1063-7826/article/view/198502">https://journals.rcsi.science/1063-7826/article/view/198502</self-uri><abstract xml:lang="en"><p id="idm45257552906000">In this publication, the results of development of the technology of the epitaxial growth of GaN on single-crystal langasite substrates La<sub>3</sub>Ga<sub>5</sub>SiO<sub>14</sub> (0001) by the plasma-assisted molecular-beam epitaxy (PA MBE) method are reported. An investigation of the effect of the growth temperature at the initial stage of deposition on the crystal quality and morphology of the obtained GaN layer is performed. It is demonstrated that the optimal temperature for deposition of the initial GaN layer onto the langasite substrate is about ~520°C. A decrease in the growth temperature to this value allows the suppression of oxygen diffusion from langasite into the growing layer and a decrease in the dislocation density in the main GaN layer upon its subsequent high-temperature deposition (~700°C). Further lowering of the growth temperature of the nucleation layer leads to sharp degradation of the GaN/LGS layer crystal quality. As a result of the performed research, an epitaxial GaN/LGS layer with a dislocation density of ~10<sup>11</sup> cm<sup>–2</sup> and low surface roughness (&lt;2 nm) is obtained.</p></abstract></article-meta></front><body></body><back><ref-list/></back></article>
