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<article xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:ali="http://www.niso.org/schemas/ali/1.0/" article-type="research-article" dtd-version="1.2" xml:lang="en"><front><journal-meta><journal-id journal-id-type="publisher-id">Semiconductors</journal-id><journal-title-group><journal-title xml:lang="en">Semiconductors</journal-title><trans-title-group xml:lang="ru"><trans-title>Semiconductors</trans-title></trans-title-group></journal-title-group><issn publication-format="print">1063-7826</issn><issn publication-format="electronic">1090-6479</issn><publisher><publisher-name xml:lang="en">Физико-технический институт им. А.Ф.Иоффе РАН</publisher-name></publisher></journal-meta><article-meta><article-id pub-id-type="publisher-id">196830</article-id><article-id pub-id-type="doi">10.1134/S1063782616020159</article-id><article-categories><subj-group subj-group-type="toc-heading"><subject>Fabrication, Treatment, and Testing of Materials and Structures</subject></subj-group><subj-group subj-group-type="article-type"><subject>Research Article</subject></subj-group></article-categories><title-group><article-title xml:lang="en">Features of InN growth by nitrogen-plasma-assisted MBE at different ratios of fluxes of group-III and -V elements</article-title></title-group><contrib-group><contrib contrib-type="author"><name><surname>Lobanov</surname><given-names>D. N.</given-names></name><address><country country="RU">Russian Federation</country></address><email>dima@ipmras.ru</email><xref ref-type="aff" rid="aff1"/><xref ref-type="aff" rid="aff2"/></contrib><contrib contrib-type="author"><name><surname>Novikov</surname><given-names>A. V.</given-names></name><address><country country="RU">Russian Federation</country></address><email>dima@ipmras.ru</email><xref ref-type="aff" rid="aff1"/><xref ref-type="aff" rid="aff2"/></contrib><contrib contrib-type="author"><name><surname>Andreev</surname><given-names>B. A.</given-names></name><address><country country="RU">Russian Federation</country></address><email>dima@ipmras.ru</email><xref ref-type="aff" rid="aff1"/><xref ref-type="aff" rid="aff2"/></contrib><contrib contrib-type="author"><name><surname>Bushuykin</surname><given-names>P. A.</given-names></name><address><country country="RU">Russian Federation</country></address><email>dima@ipmras.ru</email><xref ref-type="aff" rid="aff1"/></contrib><contrib contrib-type="author"><name><surname>Yunin</surname><given-names>P. A.</given-names></name><address><country country="RU">Russian Federation</country></address><email>dima@ipmras.ru</email><xref ref-type="aff" rid="aff1"/></contrib><contrib contrib-type="author"><name><surname>Skorohodov</surname><given-names>E. V.</given-names></name><address><country country="RU">Russian Federation</country></address><email>dima@ipmras.ru</email><xref ref-type="aff" rid="aff1"/></contrib><contrib contrib-type="author"><name><surname>Krasilnikova</surname><given-names>L. V.</given-names></name><address><country country="RU">Russian Federation</country></address><email>dima@ipmras.ru</email><xref ref-type="aff" rid="aff1"/><xref ref-type="aff" rid="aff2"/></contrib></contrib-group><aff id="aff1"><institution>Institute of Physics of Microstructures</institution></aff><aff id="aff2"><institution>Lobachevsky State University</institution></aff><pub-date date-type="pub" iso-8601-date="2016-02-01" publication-format="electronic"><day>01</day><month>02</month><year>2016</year></pub-date><volume>50</volume><issue>2</issue><fpage>261</fpage><lpage>265</lpage><history><date date-type="received" iso-8601-date="2023-12-23"><day>23</day><month>12</month><year>2023</year></date></history><permissions><copyright-statement xml:lang="en">Copyright ©; 2016, Pleiades Publishing, Ltd.</copyright-statement><copyright-year>2016</copyright-year><copyright-holder xml:lang="en">Pleiades Publishing, Ltd.</copyright-holder></permissions><self-uri xlink:href="https://journals.rcsi.science/1063-7826/article/view/196830">https://journals.rcsi.science/1063-7826/article/view/196830</self-uri><abstract xml:lang="en"><p id="idm45257554969872">The results of investigations of the effect of the ratios of fluxes of the Group-III and -V elements on the structural and optical properties of an InN film deposited by plasma-assisted molecular-beam epitaxy (MBE) are presented. It is shown that the InN layer consists of free-standing nanocolumns at a flux ratio of III/V &lt; 0.6. InN growth becomes two-dimensional (2D) in the ratio range 0.6 &lt; III/V &lt; 0.9; however, the InN layer has a nanoporous structure. Upon passage to metal-rich conditions of growth (III/V ∼1.1), the InN layer becomes continuous. The passage from 3D to 2D growth is accompanied by an increase in the threading-dislocation density. It results in a decrease in the photoluminescence (PL) intensity of InN at room temperature. The electron concentration in the InN layers amounts to ∼5 × 10<sup>18</sup> cm<sup>–3</sup>, which results in a shift of the PL-signal peak to the wavelength region of 1.73–1.8 μm and to a shift of the absorption edge to the region of ∼1.65 μm.</p></abstract><kwd-group xml:lang="en"><kwd>Flux Ratio</kwd><kwd>Aluminum Nitride</kwd><kwd>Scanning Electron Micro</kwd><kwd>Nitrogen Flux</kwd><kwd>Smooth Surface Morphology</kwd></kwd-group></article-meta></front><body></body><back><ref-list/></back></article>
