Radio-frequency discharge in a molecular gas flow at a frequency of 1.76 MHz

详细

Results are presented from experiments on the initiation of a homogeneous stable capacitive RF discharge at a frequency of 1.76 MHz in a high-speed molecular gas flow between metal electrodes at a pressure of 5 Torr or dielectric-coated electrodes at a pressure of up to 50 Torr. A mechanism of the current closure in the electrode sheaths related to the primary photoelectric current generated alternately from different electrodes is proposed. The average electron energy increases via second-kind (superelastic) collisions, and fast electrons with energies corresponding to the amplitude value of the RF voltage appear in the electron energy spectrum. As a result, primary emission arises due to the excitation of emitting states from metastable molecular levels. The primary photoelectric current initiates electron avalanches in the electrode sheaths due to secondary photoelectron emission. According to calculations, the current−voltage characteristic of the sheath in this type of discharge is ascending and the field strengths in the electrode sheath and positive column are lower than those in a self-sustained dc discharge. The calculated results are compared with the experimental data.