On the Structure and Intensity of Vortex in RF Inductively Coupled Argon Plasma

Аннотация

Numerical simulation of a specific technical RF inductively coupled argon plasma with three coils, discharge current in the range of J_coil = 100–250 A, and generator frequency 3 MHz is presented. The temperature, pressure, and velocity fields are obtained under different discharge currents and different flow rates of central gas. A reversed flow (vortex) is found between the injected cool gas and high-temperature plasma-forming gas. The formation mechanisms of such a vortex and the influence of the discharge current and flow rate of central gas on the vortex structure and intensity are studied. Special attention is paid to investigating two different kinds of vortex flow patterns—Benard and toroidal. A critical flow rate of central gas above which the flow pattern would transform from Benard to toroidal is determined and approximated as a function of the discharge current by theoretical calculations and numerical simulations. The maximum negative velocities along the axis in the vortex zone are also determined under different discharge currents and different flow rates of central gas.