Spectroscopic and probe measurements of the electron temperature in the plasma of a pulse-periodic microwave discharge in argon

Аннотация

A pulse-periodic 2.45-GHz electron-cyclotron resonance plasma source on the basis of a permanent- magnet mirror trap has been constructed and tested. Variations in the discharge parameters and the electron temperature of argon plasma have been investigated in the argon pressure range of 1 × 10^–4 to 4 × 10^–3 Torr at a net pulsed input microwave power of up to 600 W. The plasma electron temperature in the above ranges of gas pressures and input powers has been measured by a Langmuir probe and determined using optical emission spectroscopy (OES) from the intensity ratios of spectral lines. The OES results agree qualitatively and quantitatively with the data obtained using the double probe.