Radio-frequency capacitive discharge with flowing liquid electrodes at reduced gas pressures

Abstract

Results are presented from experimental studies of the electrophysical and spectral characteristics of the low-temperature plasma of a radio-frequency capacitive discharge excited between two flowing liquid electrodes at gas pressures of 10³−10⁵ Pa. The plasma composition, the electron density, and the vibrational and rotational temperatures of gas molecules are estimated. The types and shapes of discharge are described, and the thermal and gas-hydrodynamic processes in the discharge zone are analyzed.