Study of ZrSiB Coatings Obtained by Magnetron Sputtering of ZrB2-20%Si and ZrB2-50%ZrSi2 Cathodes


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A comparative study of ZrSiB coatings obtained by magnetron sputtering with the use of cathodes of different phase composition is carried out. The optimal compositions from the point of view of maximum heat resistance are revealed.

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F. Kiryukhantsev-Korneev

National University of Science and Technology MISiS

编辑信件的主要联系方式.
Email: kiruhancev-korneev@yandex.ru
俄罗斯联邦, Moscow, 119049

I. Yatsyuk

National University of Science and Technology MISiS

Email: kiruhancev-korneev@yandex.ru
俄罗斯联邦, Moscow, 119049

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