Author Details
Kozak, A. O.
Issue | Section | Title | File |
Vol 38, No 4 (2016) | Production, Structure, Properties | Hard plasmachemical a-SiCN coatings | |
Vol 41, No 1 (2019) | Production, Structure, Properties | Plasma-Enhanced CVD Equipment for Deposition of Nanocomposite Nanolayered Films | |
Vol 41, No 2 (2019) | Production, Structure, Properties | Deposition and Characterization of Thin Si-B-C-N Films by DC Reactive Magnetron Sputtering of Composed Si/B4C Target |