Effect of Ion Flow Parameters on the Structure and Properties of Aluminum α-Oxide Coatings Obtained in an Arc Discharge via Ion-Assisted Reactive Anodic Evaporation

N. V. Gavrilov; A. S. Kamenetskikh; P. V. Tretnikov; A. V. Chukin

doi:10.3103/S106287381911011X

Effect of Ion Flow Parameters on the Structure and Properties of Aluminum α-Oxide Coatings Obtained in an Arc Discharge via Ion-Assisted Reactive Anodic Evaporation

作者: Gavrilov N.V.¹, Kamenetskikh A.S.¹, Tretnikov P.V.¹, Chukin A.V.²
隶属关系:
1. Institute of Electrophysics, Ural Branch, Russian Academy of Sciences
2. Yeltsin Ural Federal University
期: 卷 83, 编号 11 (2019)
页面: 1419-1423
栏目: Article
URL: https://journals.rcsi.science/1062-8738/article/view/187586
DOI: https://doi.org/10.3103/S106287381911011X
ID: 187586

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详细

Aluminum oxide coatings are fabricated in an arc discharge through the reactive thermal anode evaporation of aluminum with intense ion assistance. The effect the bias voltage and ion current density have on the structure and properties of the Al₂O₃ α-phase that forms on a stainless steel substrate with an isostructural Cr₂O₃ sublayer at 600°С is studied.