电邮这篇文章 CHOOSING THE BROADBAND MONITORING ALGORITHM FOR THE DEPOSITION PROCESS OF OPTICAL COATINGS WITH ACCOUNTING FOR THE SELF-COMPENSATION EFFECT OF ERRORS
- 作者: Sharov A.N1,2, Tikhonravov A.V3,4, Sharapova S.A3, Yagola A.G5
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隶属关系:
- Moscow State University
- Shenzhen MSU-BIT University, Faculty of Computational Mathematics and Cybernetics
- Moscow State University, Research Computing Center
- Moscow Center for Fundamental and Applied Mathematics
- МГУ имени М.В. Ломоносова
- 期: 卷 65, 编号 4 (2025)
- 页面: 515–527
- 栏目: Partial Differential Equations
- URL: https://journals.rcsi.science/0044-4669/article/view/295423
- DOI: https://doi.org/10.31857/S0044466925040085
- EDN: https://elibrary.ru/IDMQJS
- ID: 295423
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详细
Two algorithms for broadband optical monitoring of the deposition of optical coatings are considered: the first one is without solving the additional inverse problem for refining the thicknesses of already deposited layers, the second one is with its solution. It is shown that refinement of the thicknesses of already deposited layers reduces errors in the layer thicknesses, but does not always provide a more accurate implementation of the required spectral properties of the coating. It is demonstrated for the first time that when choosing a control algorithm, the presence of the error self-compensation effect should be taken into account.
作者简介
A. Sharov
Moscow State University; Shenzhen MSU-BIT University, Faculty of Computational Mathematics and Cybernetics
Email: scharov.aleksandr@physics.msu.ru
Moscow, Russia; Shenzhen, China
A. Tikhonravov
Moscow State University, Research Computing Center; Moscow Center for Fundamental and Applied MathematicsMoscow, Russia; Moscow, Russia
S. Sharapova
Moscow State University, Research Computing CenterMoscow, Russia
A. Yagola
МГУ имени М.В. ЛомоносоваМосква, Россия
参考
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- Tikhonravov A. Optical Coatings: design, characterization, monitoring // SPIE, Bellingham, WA, United States, 2024.
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- Tikhonravov A., Kochikov I., Sharapova S., and Yagola A. Optical monitoring of coating production: correlation of errors and errors self-compensation // Proceed. of SPIE – Inter. Soc. Optic. Engineer. 2021. V. 11872. P. 1–7.
- Sharov A.N., Lukyanenko D.V., Tikhonravov A.V., and Yagola A.G. Evaluation of the efficiency of a simplified simulator of optical coating deposition // Moscow Univer. Phys. Bull. 2023. V. 78. № 2. P. 135–144.
- Sharov A.N., Sharapova S.A., Tikhonravov A.V., and Yagola A.G. Consideration of the distribution of noise level by wavelength in broadband control of the optical coating deposition process // Moscow Univer. Phys. Bull. 2024. V. 79. № 1. P. 1–6.
- Tikhonravov A.V., Lagutina A.A., Lagutin Iu.S., Lukyanenko D.V., Sharapova S.A., Sharov A.N., and Yagola A.G. On the choice of monitoring procedure of optical coating deposition // Moscow Univer. Phys. Bull. 2023. V. 78. № 6. P. 783–789.
- Lagutina A.A. Comparison of monochromatic monitoring strategies for the deposition process of optical coatings // Moscow Univer. Phys. Bull. 2022. V. 77. № 6. P. 818–824.
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