Thermodynamic Modeling and Experimental Implementation of the Synthesis of Vanadium Oxide Films
- Autores: Shestakov V.1,2, Seleznev V.3, Mutilin S.3, Kichay V.1, Yakovkina L.1
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Afiliações:
- Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences
- Novosibirsk State University of Architecture and Civil Engineering
- Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences
- Edição: Volume 68, Nº 5 (2023)
- Páginas: 651-657
- Seção: ФИЗИКО-ХИМИЧЕСКИЙ АНАЛИЗ НЕОРГАНИЧЕСКИХ СИСТЕМ
- URL: https://journals.rcsi.science/0044-457X/article/view/136363
- DOI: https://doi.org/10.31857/S0044457X23600019
- EDN: https://elibrary.ru/SOHBQS
- ID: 136363
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Resumo
The paper describes the thermodynamic modeling and experimental study of the synthesis of vanadium oxide films at various temperatures from the tetrakis(ethylmethylaminovanadium) V[NC3H8]4 precursor in the presence of oxygen in an argon atmosphere. The thermodynamic modeling was carried out using the calculation of chemical equilibria based on the minimization of the Gibbs energy of the system. In the experimental part of the paper, the films were synthesized by the atomic layer deposition procedure. The thermodynamic modeling and experimental results agree with each other and can be used to develop procedures for the synthesis of film coatings based on vanadium oxides.
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Sobre autores
V. Shestakov
Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences; Novosibirsk State University of Architecture and Civil Engineering
Email: vsh@niic.nsc.ru
630090, Novosibirsk, Russia; 630008, Novosibirsk, Russia
V. Seleznev
Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences
Email: vsh@niic.nsc.ru
630090, Novosibirsk, Russia
S. Mutilin
Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences
Email: vsh@niic.nsc.ru
630090, Novosibirsk, Russia
V. Kichay
Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences
Email: vsh@niic.nsc.ru
630090, Novosibirsk, Russia
L. Yakovkina
Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences
Autor responsável pela correspondência
Email: vsh@niic.nsc.ru
630008, Novosibirsk, Russia
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