Modeling and Experimental Verification of a Dual-slider Piezo-actuated Linear Motor

Аннотация

The model of a dual-slider actuation method is established and two prototypes of the motor are constructed for experimental verification. The dual-slider linear motor consists of two mass blocks which are bonded by a piezoelectric element, a base and a plastic plate. The two mass blocks and the piezoelectric element serve as a slider. By changing the frictional forces of each contact surface of the motor, the slider can be driven in different directions based on the principle of impact drive mechanism, of which maximum velocities are 2.63 mm/s and –1.02 mm/s when driven at the same duty ratio of 90%. The moving range of the slider is 33 mm and the positioning precision is 40 nm. It has been verified that the experimental results are consistent with the theoretical results.